Batch micromachining uses silicon wafers to remove material until it reaches its final shape, while surface micromachining builds up a part layer by layer. Mass micromachining typically uses wet chemical etching, but dry etching using a plasma or laser system is becoming more popular. Silicon is the most common material used, and wet etching is […]
Surface micromachining is a process used to create integrated circuits and sensors with up to 100 layers of circuit patterns on a chip. It uses selected materials and wet and dry etching processes to form the layers. This process is used in motion sensors, accelerometers, gyroscopes, and consumer electronics. The process uses crystalline silicon chip […]
