Miniaturization has led to the development of microactuators, which are often made using industrial processes such as lithography and micromachining. There are various types, including electrostatic, electromagnetic, piezoelectric, and ultrasonic microactuators, which can be used in small motors and other miniature devices. The production of microactuators involves etching silicone parts and using lithography and micromachining to position individual atoms and cells. Microactuators have many applications, including in small mirrors for displays and projectors, current relays, and hard drive mechanisms.
Actuators generally use an energy source to move or control mechanical components. They are often found in engines and various machines. Many types of mechanical devices have been miniaturized over the years, but this process typically requires individual components to be much smaller as well. Miniaturization in the 21st century has progressed to the point where microactuators and other parts are so small that powerful microscopes often need to be used to view them. Industrial processes such as lithography and micromachining are used to make a microactuator, and there are also various types.
An electrostatic microactuator is a common variety, but scientists can also build electromagnetic varieties that can produce more energy to power a device such as a motor. They are sometimes difficult to make, but are manufactured by methods typically used to make integrated circuits. Motors about 0.04 inch (1 millimeter) in diameter were made and were often used by researchers to insert tiny catheters into biological cells.
There’s also a piezoelectric micro-actuator with composite materials that react in a similar way to crystals, which when pushed, create an electrical voltage. Thin films can be deposited on silicon capable of producing motion over very short distances. They have sometimes been used in miniature micro rotors. Ultrasonic microactuators are often used in small motors integrated in piezoelectric devices. These can be integrated, for example, into the autofocus mechanisms of small cameras.
Moving mechanical components can be built on a small scale, but an electrostatic microactuator is typically made of a material that bends based on electrical charges. The movement is usually microscopic in size and a small amount of force is produced. Some rotational motors and linear motion comb drives have been developed based on this principle.
Microactuators can be used to build small mirrors for displays and projectors. Microscopic current relays and tiny mechanisms to control hard drives often make use of such miniature devices. They are often called microelectromechanical systems (MEMS), a category that includes many types of miniature moving parts.
The production of micro-actuators can be achieved by etching silicone parts. Lithography is often used to make circuit boards. Light, chemicals, and a layer made up of the parts to be added are usually combined in this process. The finished product is usually produced in layers, while micromachining often involves lasers and scanning electron microscopes, for example, to position individual atoms and cells. Both processes can be used to move microactuator parts and build a microminiature device.
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